Lisele tsa letsatsi

Lisele tsa letsatsi li arotsoe ka silicon ea crystalline le silicon ea amorphous, eo har'a eona lisele tsa silicon tsa crystalline li ka aroloa ka ho eketsehileng ka lisele tsa monocrystalline le lisele tsa polycrystalline;katleho ea silicon ea monocrystalline e fapane le ea silicon ea kristale.

Sehlopha:

Lisele tsa silicon tse sebelisoang hangata tsa letsatsi la China li ka aroloa ka:

kristale e le 'ngoe 125 * 125

kristale e le 'ngoe 156 * 156

Polycrystalline 156 * 156

kristale e le 'ngoe 150 * 150

kristale e le 'ngoe 103*103

Polycrystalline 125 * 125

Mokhoa oa tlhahiso:

Ts'ebetso ea tlhahiso ea lisele tsa letsatsi e arotsoe ka silicon wafer inspection - surface texturing le pickling - diffusion junction - dephosphorization silicon glass - plasma etching and pickling - anti-reflection coating - screen printing - Rapid sintering, joalo-joalo Lintlha ke tse latelang:

1. Tlhahlobo ea sephaphatha sa silicon

Li-wafers tsa silicon ke bajari ba lisele tsa letsatsi, 'me boleng ba li-wafers tsa silicon bo supa ka ho toba katleho ea phetoho ea lisele tsa letsatsi.Ka hona, hoa hlokahala ho hlahloba liphaphatha tsa silicon tse kenang.Ts'ebetso ena e sebelisoa haholo-holo bakeng sa tekanyo ea marang-rang ea litekanyo tse ling tsa tekheniki tsa li-wafers tsa silicon, mekhahlelo ena e kenyelletsa ho se leka-lekane ha sephaphatha, bophelo bohle ba mojari, resistivity, mofuta oa P/N le microcracks, joalo-joalo Sehlopha sena sa thepa se arotsoe ka ho kenya le ho laolla , phetisetso ea silicon wafer, karolo ea ho kopanya tsamaiso le li-module tse 'nè tsa ho lemoha.Har'a tsona, mochine oa photovoltaic silicon wafer detector o lemoha ho se leka-lekane ha bokaholimo ba sephaphatha sa silicon, 'me ka nako e le 'ngoe e lemoha likarolo tsa ponahalo tse kang boholo le diagonal tsa silicon wafer;mochine oa ho lemoha micro-crack o sebelisetsoa ho lemoha mapetsong a ka hare a silicon wafer;Ho feta moo, ho na le limmojule tse peli tsa Detection, e 'ngoe ea li-module tsa tlhahlobo ea inthanete e sebelisoa haholo ho lekola matla a mangata a silicon le mofuta oa li-wafers tsa silicon,' me mojule o mong o sebelisetsoa ho bona nako ea bophelo ea li-wafers tsa silicon.Pele ho fumanoa nako ea bophelo bohle le ho hanyetsa, hoa hlokahala ho lemoha mapetsong a diagonal le micro-wafer ea silicon, 'me ka boeona u tlose sephaphatha sa silicon se senyehileng.Thepa ea tlhahlobo ea silicon wafer e ka jarolla le ho laolla liphaephe ka bo eona, 'me e ka beha lihlahisoa tse sa tšoaneleheng sebakeng se tsitsitseng, kahoo ea ntlafatsa ho nepahala le ts'ebetso ea tlhahlobo.

2. Bokaholimo bo entsoe

Ho lokisoa ha sebopeho sa silicon ea monocrystalline ke ho sebelisa sekoaelo sa anisotropic sa silicon ho etsa limilione tsa liphiramide tsa tetrahedral, ke hore, meaho ea piramite, holim'a lisenthimithara tse ling le tse ling tsa silicon.Ka lebaka la ho bonahatsa hangata le ho refraction ea leseli la ketsahalo holim'a metsi, ho monya ha leseli hoa eketseha, 'me matla a nako e khutšoanyane le ho fetola matla a betri a ntlafatsoa.Tharollo ea anisotropic etching ea silicon hangata ke tharollo ea alkaline e chesang.Li-alkali tse fumanehang ke sodium hydroxide, potassium hydroxide, lithium hydroxide le ethylenediamine.Boholo ba silicon ea suede e lokisoa ka ho sebelisa tharollo e theko e tlaase ea sodium hydroxide e nang le mahloriso a ka bang 1%, 'me mocheso oa etching ke 70-85 ° C.E le hore u fumane suede e ts'oanang, lino tse tahang tse kang ethanol le isopropanol le tsona li lokela ho kenngoa ho tharollo e le lisebelisoa tse rarahaneng ho potlakisa ho bola ha silicon.Pele suede e lokisoa, sephaphatha sa silicon se tlameha ho ts'oaroa ka pele, 'me hoo e ka bang 20-25 μm e kentsoe ka tharollo ea alkaline kapa acidic etching.Ka mor'a hore suede e behoe, ho hloekisa lik'hemik'hale ka kakaretso ho etsoa.Li-wafers tsa silicon tse lokiselitsoeng holimo ha lia lokela ho bolokoa ka metsing nako e telele ho thibela tšilafalo, 'me li lokela ho hasana kapele kamoo ho ka khonehang.

3. Lefito la ho arola

Lisele tsa letsatsi li hloka sebaka se seholo sa PN junction ho hlokomela phetoho ea matla a leseli ho matla a motlakase, 'me sebōpi sa diffusion ke lisebelisoa tse khethehileng bakeng sa ho etsa motsoako oa PN oa lisele tsa letsatsi.Sebōpi sa tubular diffusion haholo-holo se entsoe ka likarolo tse 'nè: likarolo tse ka holimo le tse ka tlaase tsa sekepe sa quartz, kamore ea khase ea ho ntša metsi, karolo ea' mele oa sebōpi le karolo ea khabinete ea khase.Phatlalatso ka kakaretso e sebelisa mohloli oa metsi oa phosphorus oxychloride e le mohloli oa phallo.Beha sephaephe sa silicon sa mofuta oa P ka har'a sets'oants'o sa quartz sa sebopi sa tubular diffusion, 'me u sebelise naetrojene ho tlisa phosphorus oxychloride ka sejaneng sa quartz mocheso o phahameng oa likhato tse 850-900 tsa Celsius.Phosphorus oxychloride e kopana le sephaphatha sa silicon ho fumana phosphorus.athomo.Ka mor'a nako e itseng, liathomo tsa phosphorus li kena ka holim'a lesela la silicon ho pota-pota ka hohle, 'me li phunyeletse le ho hasana ka har'a sephaphatha sa silicon ka likheo tse pakeng tsa liathomo tsa silicon, li etsa sebopeho pakeng tsa N-mofuta oa semiconductor le P- thaepa semiconductor, ke hore, mateano a PN.Kopano ea PN e hlahisoang ke mokhoa ona e na le ts'ebetso e ntle, ho se ts'oane ha ho hanyetsa ha lakane ho ka tlase ho 10%, 'me nako ea bophelo ea bajari ba fokolang e ka ba kholo ho feta 10ms.Ho etsoa ha PN junction ke ts'ebetso ea mantlha le ea bohlokoahali tlhahisong ea lisele tsa letsatsi.Hobane ke ho thehoa ha motsoako oa PN, li-electrone le likoti ha li khutlele libakeng tsa tsona tsa pele ka mor'a ho phalla, e le hore ho thehoe hona joale, 'me hona joale ho ntšoe ka terata, e leng hona joale e tobileng.

4. Dephosphorylation silicate khalase

Ts'ebetso ena e sebelisoa ts'ebetsong ea tlhahiso ea lisele tsa letsatsi.Ka ho chesoa ka lik'hemik'hale, sephaphatha sa silicon se qoelisoa ka har'a tharollo ea hydrofluoric acid ho hlahisa karabelo ea lik'hemik'hale ho hlahisa motsoako o qhibilihang oa hexafluorosilicic acid ho tlosa sistimi ea phallo.Lera la khalase ea phosphosilicate e entsoeng holim'a lesela la silicon ka mor'a mateano.Nakong ea ts'ebetso ea ho arola, POCL3 e sebetsana le O2 ho theha P2O5 e behiloeng holim'a sephaphatha sa silicon.P2O5 e sebetsana le Si ho hlahisa SiO2 le liathomo tsa phosphorus, Ka tsela ena, lera la SiO2 le nang le likarolo tsa phosphorus le thehoa holim'a lesela la silicon, le bitsoang phosphosilicate khalase.Thepa ea ho tlosa khalase ea silicate ea phosphorus hangata e entsoe ka 'mele o ka sehloohong, tanka ea ho hloekisa, sistimi ea servo drive, letsoho la mochini, sistimi ea taolo ea motlakase le sistimi ea othomathike ea asiti.Mehloli e meholo ea matla ke hydrofluoric acid, naetrojene, moea o hatelitsoeng, metsi a hloekileng, moea o tsoang mochesong le metsi a litšila.Hydrofluoric acid e qhala silika hobane hydrofluoric acid e kopana le silika ho hlahisa khase e sa fetoheng ea silicon tetrafluoride.Haeba hydrofluoric acid e le ngata, tetrafluoride ea silicon e hlahisoang ke karabelo e tla tsoela pele ho itšoara ka hydrofluoric acid ho etsa motsoako o qhibilihang, hexafluorosilicic acid.

5. Plasma etching

Ho tloha nakong ea ts'ebetso ea ho hasana, le haeba ho amoheloa ka morao ho khutlela morao, phosphorus e tla hasana hohle libakeng tsohle ho kenyeletsa le mathōko a sephaphatha sa silicon.Li-electrone tse entsoeng ka lifoto tse bokelletsoeng ka lehlakoreng le ka pele la mokoloko oa PN li tla phalla haufi le sebaka se ka thōko moo phosphorus e arolelanoang ka lehlakoreng le ka morao la mokoloko oa PN, e leng se bakang potoloho e khutšoanyane.Ka hona, silicon e nang le doped e pota-potileng sele ea letsatsi e tlameha ho kenngoa ho tlosa mokoloko oa PN moeling oa sele.Ts'ebetso ena hangata e etsoa ho sebelisoa mekhoa ea etching ea plasma.Plasma etching e maemong a khatello e tlase, limolek'hule tsa motsoali tsa khase e sebetsang ea CF4 li thabisoa ke matla a maqhubu a seea-le-moea ho hlahisa ionization le ho theha plasma.Plasma e entsoe ka lielektrone tse chesitsoeng le li-ion.Tlas'a tšusumetso ea li-electrone, khase e ka kamoreng ea karabelo e ka monya matla 'me ea etsa palo e kholo ea lihlopha tse sebetsang ho phaella ho fetoloa ho li-ion.Lihlopha tse sebetsang tse sebetsang li fihla holim'a SiO2 ka lebaka la ho hasana kapa tlas'a ts'ebetso ea tšimo ea motlakase, moo li itšoarang ka lik'hemik'hale ka holim'a thepa e lokelang ho kenngoa, 'me li etsa lihlahisoa tse sa tsitsang tse arohaneng ho tloha holim'a thepa e lokelang ho etsoa. e tšeloa, 'me e pompeloa ka ntle ho lesoba ke sistimi ea vacuum.

6. Ho roala ha anti-reflection

Ponahalo ea sefahleho sa silicon e betliloeng ke 35%.E le ho fokotsa ponahalo ea holim'a metsi le ho ntlafatsa ts'ebetso ea phetoho ea sele, hoa hlokahala ho kenya lesela la silicon nitride anti-reflection film.Tlhahisong ea indasteri, lisebelisoa tsa PECVD li atisa ho sebelisoa ho lokisetsa lifilimi tse khahlanong le ho bonahatsa.PECVD ke plasma e ntlafalitsoeng ea mouoane oa lik'hemik'hale.Molao-motheo oa eona oa tekheniki ke ho sebelisa plasma ea mocheso o tlase e le mohloli oa matla, sampole e behiloe ka har'a cathode ea phallo e khanyang tlas'a khatello e tlase, ho tsoa ha khanya ho sebelisoa ho futhumatsa sampole ho mocheso o reriloeng esale pele, ebe palo e loketseng ea ho hlahisoa likhase tse sebetsang ka matla SiH4 le NH3.Ka mor'a letoto la lik'hemik'hale le liphetoho tsa plasma, filimi e tiileng-state, ke hore, filimi ea silicon nitride, e thehoa holim'a sampuli.Ka kakaretso, botenya ba filimi e kentsoeng ke mokhoa ona oa ho beha mouoane oa lik'hemik'hale ka plasma ke hoo e ka bang 70 nm.Lifilimi tsa botenya bona li na le ts'ebetso ea optical.Ho sebelisa molao-motheo oa ho kena-kenana le filimi e tšesaane, ho bonahatsa leseli ho ka fokotseha haholo, nako e khutšoanyane ea nako le tlhahiso ea betri e eketseha haholo, 'me katleho e boetse e ntlafatsoa haholo.

7. khatiso ea skrine

Ka mor'a hore sele ea letsatsi e fetele lits'ebetsong tsa ho ngola, ho hasana le PECVD, ho thehoe motsoako oa PN, o ka hlahisang hona joale tlas'a khanya.E le ho romela thepa ea hona joale e hlahisoang, ho hlokahala ho etsa li-electrode tse ntle le tse mpe holim'a betri.Ho na le mekhoa e mengata ea ho etsa li-electrode, 'me khatiso ea skrine ke mokhoa o tloaelehileng oa tlhahiso ea ho etsa li-electrode tsa letsatsi.Khatiso ea skrine ke ho hatisa mokhoa o reriloeng esale pele holim'a substrate ka ho hatisa.Thepa ena e na le likarolo tse tharo: khatiso ea silevera-aluminium paste ka morao ho beteri, khatiso ea aluminium ka morao ea betri, le khatiso ea silevera-paste ka pele ho betri.Molao-motheo oa eona oa ts'ebetso ke: sebelisa letlooeng la mohlala oa skrine ho kenella ka har'a slurry, sebelisa khatello e itseng karolong e hlabang ea skrine ka sekhechana, 'me u lebe pheletsong e' ngoe ea skrine ka nako e le 'ngoe.Enke e petetsoa ho tloha letlooeng la karolo ea setšoantšo ho ea ho substrate ke squeegee ha e ntse e tsamaea.Ka lebaka la phello ea viscous ea peista, khatiso e tsitsitsoe ka har'a mefuta e itseng, 'me squeegee e lula e kopana le mohala oa khatiso oa skrine le substrate nakong ea khatiso,' me mohala oa ho kopana o tsamaea le motsamao oa squeegee ho qeta. sekhahla sa khatiso.

8. ho sinter ka potlako

Sephaphatha sa silicon se hatisitsoeng skrineng se ke ke sa sebelisoa ka kotloloho.E hloka ho chesoa ka potlako ka sebōping sa sintering ho chesa "organic resin binder", e siea hoo e ka bang li-electrode tse hloekileng tsa silevera tse khomaretsoeng haufi le sephaphatha sa silicon ka lebaka la ketso ea khalase.Ha mocheso oa li-electrode tsa silevera le silicon ea kristale li fihla mocheso oa eutectic, liathomo tsa silicon tsa crystalline li kopantsoe le thepa ea elektrode ea silevera e qhibilihisitsoeng ka tekanyo e itseng, ka tsela eo ho theha ho kopana ha ohmic ea li-electrode tse ka holimo le tse tlaase, le ho ntlafatsa potoloho e bulehileng. voltage le ho tlatsa ntlha ea sele.Paramethara ea bohlokoa ke ho e etsa hore e be le litšobotsi tsa ho hanyetsa ho ntlafatsa katleho ea phetoho ea sele.

Sebōpi sa sintering se arotsoe ka mekhahlelo e meraro: pre-sintering, sintering, le cooling.Sepheo sa sethala sa pele ho sintering ke ho senya le ho chesa polymer binder ka slurry, 'me mocheso o nyoloha butle sethaleng sena;sethaleng sa sintering, liketso tse fapa-fapaneng tsa 'mele le tsa lik'hemik'hale li phethoa' meleng o sintered ho theha sebopeho sa filimi se hanyetsang, se etsang hore e be mohanyetsi e le kannete., mocheso o fihla sehlohlolong sethaleng sena;sethaleng sa ho pholile le se pholileng, khalase e pholile, e thata ebile e tiile, e le hore mohaho oa filimi o hanyetsang o khomarele ka mokhoa o tsitsitseng substrate.

9. Lipheripherals

Ts'ebetsong ea tlhahiso ea lisele, lisebelisoa tsa peripheral joalo ka phepelo ea motlakase, matla, phepelo ea metsi, drainage, HVAC, vacuum le mouoane o khethehileng le tsona lia hlokahala.Tšireletso ea mollo le lisebelisoa tsa tšireletso ea tikoloho le tsona ke tsa bohlokoa ka ho khetheha ho netefatsa polokeho le tsoelo-pele e tsitsitseng.Bakeng sa mohala oa tlhahiso ea lisele tsa letsatsi o nang le tlhahiso ea selemo le selemo ea 50MW, tšebeliso ea matla ea ts'ebetso le lisebelisoa tsa motlakase feela e ka bang 1800KW.Palo ea ts'ebetso ea metsi a hloekileng e ka ba lithane tse 15 ka hora, 'me litlhoko tsa boleng ba metsi li kopana le maemo a tekheniki a EW-1 a China's electronic grade grade water GB/T11446.1-1997.Palo ea metsi a pholileng a ts'ebetso e boetse e ka ba lithane tse 15 ka hora, boholo ba likaroloana tsa boleng ba metsi ha boa lokela ho ba kholo ho feta li-microns tse 10, 'me mocheso oa phepelo ea metsi e lokela ho ba 15-20 °C.Molumo oa vacuum exhaust o ka ba 300M3/H.Ka nako e tšoanang, li-cubic metres tse ka bang 20 tsa litanka tsa polokelo ea nitrogen le 10 cubic metres tsa litanka tsa polokelo ea oksijene le tsona lia hlokahala.Ho ela hloko lintlha tsa polokeho ea likhase tse khethehileng tse kang silane, ho boetse hoa hlokahala ho theha kamore e khethehileng ea khase ho netefatsa polokeho ea tlhahiso ka botlalo.Ho feta moo, litora tsa mollo oa silane le litsi tsa ho hloekisa likhoerekhoere le tsona ke lisebelisoa tse hlokahalang bakeng sa tlhahiso ea lisele.